GWMS Oil free Ultrahigh Vacuum Unit

GWMS oil free ultrahigh vacuum unit is combined turbo molecular pump, gate or angle valve, connect hose, solenoid valves, vacuum meter and GWSP oil free scroll vacuum pump in an integrated unit for oil free ultra high vacuum pumping.

Model GWMS100/150 GWMS300/150 GWMS650/300 GWMS1200/600
Main pump-turbomolecular pump
GWFB-110
GWFB-300
GWFB-650
GWFB-1200
Backing pump-scroll pump
GWSP150
GWSP150
GWSP300
GWSP600
Pumpinng Speed
Mainn pump at 50Hz
l/s
110
300
650
1200
m³/h
3.96×102
1.08×103
2.34×103
4.32×103
cmf
2.33×102
6.36×102
1.37×103
2.54×103
Pumping Speed
Backing pump at 50Hz
l/s
2.0
2.0
4.3
8.7
m³/h
7.2
7.2
15.5
31.3
cmf
4.2
4.2
9.1
18.4
Ultimate Pressure
Pa
5.00×10-5
2.00×10-5
2.00×10-5
2.00×10-5
Torr
3.75×10-7
1.50×10-7
1.50×10-7
1.50×10-7
psi
7.25×10-9
2.90×10-9
2.90×10-9
2.90×10-9
Power Source Type
1 phase/3 phase, 220v/380v, 50Hz/60Hz
Inlet Flange
CF100/ISO-K100
CF100/ISO-K100
CF150/ISO-K160
CF200/ISO-K200
Foreline Flange
KF25
KF25
KF25
KF40
Exhaust Flange
KF25
KF25
KF25
KF25
Noise Level
dB(A)
≤57
≤57
≤63
≤63
Dimensions
inch
19.7*20.1*33.1
27.2*20.7*21.7
33.9*30.6*33.5
33.9*30.6*33.5
mm
500*510*840
690*526*550
860*776*850
860*776*850
Weight
lbs
119
150
342
359
kg
54
68
155
163
Ambient Temp
℉
41~104
Cooling Type
Air cooled

Safety Precautions

For dry and clean gas applications. Gas temperature must be below 122°F (50°C). Avoid direct intake of liquids, excessive water vapor, particles, dust, and corrosive gases unless the pump is specifically configured for these conditions.

Leak detection

Accelerators

Spectroscopy

Scanning electron microscopy

Space environment animation

Surface analysis instruments

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    Why Choose This Product?

    Engineered for reliability and built to perform. This product is designed to solve real challenges, reduce downtime, and deliver long-term value.

    Reduce Downtime

    Minimize unexpected breakdowns and keep your operations running smoothly.

    Lower Operating Costs

    Designed to reduce maintenance needs and extend equipment life, saving you money.

    Built For Reliability

    High-quality materials and precision engineering ensure consistent performance.

    Improve Productivity

    Reliable performance leads to better efficiency and higher overall productivity.

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